Imaging of nanoscale linear permittivity by using ∂C/∂z-mode scanning nonlinear dielectric microscopy


The continued miniaturization of electronic devices containing dielectric materials has increased the impact of nanoscale permittivity distributions on device characteristics. As a result, more precise control of process... [ view full abstract ]


  1. Yoshiomi Hiranaga (Tohoku University)
  2. Yasuo Cho (Tohoku University)

Topic Areas

Advanced characterisation , Dielectric properties


OS-2C » Symposium C - Advanced Characterisation (16:30 - Monday, 9th July, Panopticum Green Room)

Presentation Files

The presenter has not uploaded any presentation files.

Additional Information

Image 1
Image 2
Image 3